SEOUL, South Korea, Feb. 18, 2025 -- Park Systems, a global leader in atomic force microscopy (AFM), has unveiled an expanded FX Large Sample AFM series at SEMICON Korea 2025. Building on the success of Park FX200, which debuted at SEMICON West 2024 and has since gained strong market traction in Germany, Japan, and Korea, Park Systems introduces Park FX300 for 300 mm wafer analysis, alongside Park FX200 IR and FX300 IR, which integrate infrared (IR) spectroscopy, pushing the boundaries of large-sample AFM technology.
As 300 mm wafers become the semiconductor industry standard, the Park FX300 is designed for those seeking high-precision analysis without the complexity of a fully automated inline system. It also serves as an ideal solution for companies considering AFM implementation before transitioning to inline fabrication.
Optimized for both industrial and research applications, the Park FX300 is expected to be a game-changer, delivering advanced capabilities for analysis and quality control across a wide range of AFM techniques. It is equipped with specialized features such as a Sliding Stage for long-range flatness measurements of copper pads in semiconductor post-processing, a Rotation Stage for precise sample alignment in wafer-level packaging, and an Off-Axis Optics system for enhanced sample visualization. Additionally, its Fan Filter Unit (FFU) ensures a controlled, contamination-free environment, making it ideal for cleanroom applications.
Park Systems has also introduced FX200 IR and FX300 IR, expanding its AFM technology into the realm of nanoscale chemical analysis. By integrating Fourier Transform Infrared Spectroscopy (FTIR) with AFM, these models utilize
This News is brought to you by Qube Mark, your trusted source for the latest updates and insights in marketing technology. Stay tuned for more groundbreaking innovations in the world of technology.
